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RIS citation export for SUSP015: Deposition of Nb₃Sn Films by Multilayer Sequential Sputtering for SRF Cavity Application

AU  - Sayeed, Md.N.
AU  - Burton, M.C.
AU  - Elsayed-Ali, H.
AU  - Eremeev, G.V.
AU  - Pudasaini, U.
AU  - Reece, C.E.
AU  - Valente-Feliciano, A-M.
ED  - Michel, Peter
ED  - Arnold, André
ED  - Schaa, Volker RW
TI  - Deposition of Nb₃Sn Films by Multilayer Sequential Sputtering for SRF Cavity Application
J2  - Proc. of SRF2019, Dresden, Germany, 30 June-05 July 2019
CY  - Dresden, Germany
T2  - International Conference on RF Superconductivity
T3  - 19
LA  - english
AB  - Nb₃Sn is considered as an alternative of Nb for SRF accelerator cavity application due to its potential to obtain higher quality factors and higher accelerating gradients at a higher operating temperature. Magnetron sputtering is one of the effective techniques that can be used to fabricate Nb₃Sn on SRF cavity surface. We report on the surface properties of Nb₃Sn films fabricated by sputtering multiple layers of Nb and Sn on sapphire and niobium substrates followed by annealing at 950°C for 3 h. The crystal structure, film microstructure, composition and surface roughness were characterized by X-ray diffraction (XRD), scanning electron microscopy (SEM), energy dispersive X-ray spectroscopy (EDS), and atomic force microscopy (AFM). The RF performance of the Nb₃Sn coated Nb substrates were measured by a surface impedance characterization system. We also report on the design of a multilayer sputter deposition system to coat a single-cell SRF cavity.
PB  - JACoW Publishing
CP  - Geneva, Switzerland
SP  - 637
EP  - 641
DA  - 2019/08
PY  - 2019
SN  - 978-3-95450-211-0
DO  - doi:10.18429/JACoW-SRF2019-TUP079
UR  - http://jacow.org/srf2019/papers/tup079.pdf
ER  -