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TY - CONF AU - Sayeed, Md.N. AU - Burton, M.C. AU - Elsayed-Ali, H. AU - Eremeev, G.V. AU - Pudasaini, U. AU - Reece, C.E. AU - Valente-Feliciano, A-M. ED - Michel, Peter ED - Arnold, André ED - Schaa, Volker RW TI - Deposition of Nb₃Sn Films by Multilayer Sequential Sputtering for SRF Cavity Application J2 - Proc. of SRF2019, Dresden, Germany, 30 June-05 July 2019 CY - Dresden, Germany T2 - International Conference on RF Superconductivity T3 - 19 LA - english AB - Nb₃Sn is considered as an alternative of Nb for SRF accelerator cavity application due to its potential to obtain higher quality factors and higher accelerating gradients at a higher operating temperature. Magnetron sputtering is one of the effective techniques that can be used to fabricate Nb₃Sn on SRF cavity surface. We report on the surface properties of Nb₃Sn films fabricated by sputtering multiple layers of Nb and Sn on sapphire and niobium substrates followed by annealing at 950°C for 3 h. The crystal structure, film microstructure, composition and surface roughness were characterized by X-ray diffraction (XRD), scanning electron microscopy (SEM), energy dispersive X-ray spectroscopy (EDS), and atomic force microscopy (AFM). The RF performance of the Nb₃Sn coated Nb substrates were measured by a surface impedance characterization system. We also report on the design of a multilayer sputter deposition system to coat a single-cell SRF cavity. PB - JACoW Publishing CP - Geneva, Switzerland SP - 637 EP - 641 DA - 2019/08 PY - 2019 SN - 978-3-95450-211-0 DO - doi:10.18429/JACoW-SRF2019-TUP079 UR - http://jacow.org/srf2019/papers/tup079.pdf ER -